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nrF51422 EK "Error - flash download failed - Cortex M0

Hello, I have a problem during first programing PCA10003 blinky_example. I get an error:"Flash Download failed - "Cortex-M0" "

Keil v4.74 SDK v6.0.0

In nRFgo Studio tab "Program SoftDevice" is inactive ...

Please help me, I am frustrated.

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