Hardware timer is not able to give interrupt below 13us

Hello,

I am using nRF52832 DK board. I wanted to drive some o/p signal from the MCU. So for testing purposes, I just toggled one GPIO from the Timer CC channel. For that, I used hardware timer 3  and used its 4 compare channel and configured all in a way 10us, 20us, 30us, and 40us in Conti. mode so that it will run and toggle the GPIO on interrupt of each compare channel. Now I am not able to receive interrupt after every 10us from each CC. I can see some latency and seems like interrupts are overlaping. 

When I set it to 13, 26,39 & 52us it is working. Please suggest to me how to reduce it to 10us.

NOte: I put a statement "NRF_NVMC->ICACHECNF = 0x01;" to enable the cache with this also I am not able to achieve it.

Best Regards,

SC

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